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Author(s):
Weigel, Robert; Rosler, U.; Meier, H.; Russer, Peter 
Title:
Analysis of the Interaction of Surface Acoustic Waves with Charge Carriers in Layered Structures 
Abstract:
We have computed the propagation behavior of surface acoustic waves (SAW's) under a non-piezoelectric, conducting layer on a semi-infinite piezoelectric substrate. Due to the finite conductivity of the film which is deposited on the substrate surface the interaction of the SAW with the charge carriers in this layer involves changes in both attenuation and dispersion. In our analysis, mass loading and stress loading are taken exactly into account. We also include the space charge density distribu...    »
 
Keywords:
absorbing material, amorphous semiconductors, attenuation, attenuation coefficient, charge carriers, commercial applications, consumer applications, dimensioned semiconducting film, dispersion, elemental semiconductors, finite conductivity, fundamental SAW mode, layered structures, lithium compounds, mass loading, phase velocity, propagation behavior, SAW devices, semi-infinite piezoelectric substrate, silicon, Si-LiNbOtextlesssubtextgreater3textless/subtextgreater, Si-LiNbO3, space charge, spac...    »
 
Book / Congress title:
IEEE Ultrasonics Symposium 
Volume:
Publisher address:
Cannes, France 
Year:
1994 
Month:
oct 
Pages:
337--340