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Author(s):
Meier, H.; Russer, Peter 
Title:
Analysis of Leaky Surface Acoustic Wave Reflections 
Abstract:
An accurate understanding of the reflection behavior of leaky surface acoustic waves (LSAW) is of particular interest in order to develop sophisticated computer aided design (CAD) tools. Thus, we have analyzed the propagation and reflection characteristic of LSAW under periodic metal grating structures. The electrically and mechanically induced reflections, as well as the anisotropy of the substrate material, are rigorously taken into account. Consequently, the second order effects associated wi...    »
 
Keywords:
Al, Al electrodes, CAD, CAD tools, computer aided design tools, evanescent bulk modes, leaky surface acoustic wave reflections, LiTaOtextlesssubtextgreater3textless/subtextgreater, LiTaOtextlesssubtextgreater3textless/subtextgreater substrate, metallization ratios, periodic metal grating structures, phase velocity shift, propagating bulk modes, propagation characteristic, reflection characteristic, surface acoustic wave devices, surface acoustic wave filters, ultrasonic devices, ultrasonic propa...    »
 
Book / Congress title:
IEEE Ultrasonics Symposium 
Volume:
Publisher address:
Baltimore, MD, USA 
Year:
1993 
Month:
oct 
Pages:
201--204