The authors have grown c-axis-oriented YBa2Cu 3O7-x (YBCO) thin films and epitaxial YBCO/NdAlO 3/YBCO trilayers by sputtering. From the YBCO films, coplanar half-wavelength transmission line resonators were patterned. At 77 K the unloaded quality factors of coplanar stripline resonators were up to 2570 at 5.6 GHz. The attenuation constant of such a line was evaluated to be 0.6 dB/m at 77 K and at 5.6 GHz. Coplanar waveguide resonators yielded quality factors up to 1200 at 77 K and at 6.2 GHz resulting in an attenuation constant of 1.8 dB/m. From these measurements the surface resistance values RS of the films were determined. The lowest RS was 105 mu Omega at 77 K and at 6.2 GHz. Trilayer structures with a dielectric as thick as 800 nm were patterned into microstrip resonators. At 50 K the authors measured a quality factor of 85 at 4.7 GHz, resulting in an attenuation of 26 dB/m and a surface resistance of 340 mu Omega. For thick dielectrics the upper YBCO film already contains significant portions of polycrystalline material     «

The authors have grown c-axis-oriented YBa2Cu 3O7-x (YBCO) thin films and epitaxial YBCO/NdAlO 3/YBCO trilayers by sputtering. From the YBCO films, coplanar half-wavelength transmission line resonators were patterned. At 77 K the unloaded quality factors of coplanar stripline resonators were up to 2570 at 5.6 GHz. The attenuation constant of such a line was evaluated to be 0.6 dB/m at 77 K and at 5.6 GHz. Coplanar waveguide resonators yielded quality factors up to 1200 at 77 K and at 6.2 GHz res...     »

5.6 GHz, 77 K, attenuation constant, barium compounds, c-axis films, coplanar half-wavelength transmission line resonators, coplanar stripline resonators, dielectric, epitaxial SIS multilayers, high temperature superconductors, high-temperature superconductors, microstrip components, microstrip resonators, -NdAlO3, planar resonators, sputtered coatings, superconducting epitaxial layers, superconducting junction devices, superconducting microwave devices, superconducting thin films, surface conductivity, surface resistance, thin films, trilayers, unloaded quality factors, YBa2Cu3O7-ÎŽ, YBCO films, yttrium compounds     «

5.6 GHz, 77 K, attenuation constant, barium compounds, c-axis films, coplanar half-wavelength transmission line resonators, coplanar stripline resonators, dielectric, epitaxial SIS multilayers, high temperature superconductors, high-temperature superconductors, microstrip components, microstrip resonators, -NdAlO3, planar resonators, sputtered coatings, superconducting epitaxial layers, superconducting junction devices, superconducting microwave devices, superconducting thin films, surface condu...     »