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Document type:
Zeitschriftenaufsatz 
Author(s):
Jegert, G.; Kersch, A.; Weinreich, W.; Lugli, P. 
Title:
Monte Carlo simulation of leakage currents in TiN/ZrO2/TiN capacitors 
Abstract:
Leakage currents in TiN/high-κ-ZrO2/TiN capacitors were simulated by using a novel kinetic Monte Carlo algorithm specially designed to describe tunneling transport of charge carriers in high-κ dielectrics, including defect-assisted transport mechanisms. Comparing simulation results with experimental data, a model for electronic transport was established and validated. Transport was found to be dominated by Poole-Frenkel emission from positively charged bulk trap states at medium voltages and tra...    »
 
Journal title:
Electron Devices, IEEE Transactions on (Volume:58 , Issue: 2 ) 
Year:
2011 
Year / month:
2011-02 
Quarter:
1. Quartal 
Month:
Feb 
Pages contribution:
327-334 
Reviewed:
ja 
Language:
en 
Publisher:
IEEE Xplore Digital Library 
Semester:
WS 10-11 
Format:
Text