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- Document type:
- Konferenzbeitrag
- Author(s):
- Niessner, M. ; Iannacci, J. ; Schrag, G. ; Wachutka, G.
- Title:
- "Experimental Analysis and Modeling of the Mechanical Impact during the Dynamic Pull-In of RF-MEMS Switches"
- Pages contribution:
- pp. 267-270
- Book / Congress title:
- International Conference on Advanced Semiconductor Devices and Microsystems - ASDAM
- Congress (additional information):
- Oct. 25-27, 2010, Smolenice Castle, Slovakia
- Year:
- 2010
- Reviewed:
- ja
- Language:
- en
- Publication format:
- Format:
- Text
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