"Experimental Analysis and Modeling of the Mechanical Impact during the Dynamic Pull-In of RF-MEMS Switches"

Dokumenttyp:: Konferenzbeitrag
Autor(en):: Niessner, M. ; Iannacci, J. ; Schrag, G. ; Wachutka, G.
Titel:: "Experimental Analysis and Modeling of the Mechanical Impact during the Dynamic Pull-In of RF-MEMS Switches"
Seitenangaben Beitrag:: pp. 267-270
Kongress- / Buchtitel:: International Conference on Advanced Semiconductor Devices and Microsystems - ASDAM
Kongress / Zusatzinformationen:: Oct. 25-27, 2010, Smolenice Castle, Slovakia
Jahr:: 2010
Reviewed:: ja
Sprache:: en
Erscheinungsform:: Print
Format:: Text
BibTeX

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