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Document type:
Konferenzbeitrag 
Author(s):
Niessner, M. ; Iannacci, J. ; Schrag, G. ; Wachutka, G. 
Title:
"Experimental Analysis and Modeling of the Mechanical Impact during the Dynamic Pull-In of RF-MEMS Switches" 
Pages contribution:
pp. 267-270 
Book / Congress title:
International Conference on Advanced Semiconductor Devices and Microsystems - ASDAM 
Congress (additional information):
Oct. 25-27, 2010, Smolenice Castle, Slovakia 
Year:
2010 
Reviewed:
ja 
Language:
en 
Publication format:
Print 
Format:
Text