- Author(s):
- VEPREK, S; VEPREKHEIJMAN, MGJ
- Title:
- OPEN QUESTIONS REGARDING THE MECHANISM OF PLASMA-INDUCED DEPOSITION OF SILICON
- Journal title:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Year:
- 1991
- Journal volume:
- 11
- Journal issue:
- 3
- Pages contribution:
- 323-334
- BibTeX