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- Autor(en):
- VEPREK, S; VEPREKHEIJMAN, MGJ
- Titel:
- OPEN QUESTIONS REGARDING THE MECHANISM OF PLASMA-INDUCED DEPOSITION OF SILICON
- Zeitschriftentitel:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Jahr:
- 1991
- Band / Volume:
- 11
- Heft / Issue:
- 3
- Seitenangaben Beitrag:
- 323-334
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