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- Autor(en):
- VEPREK, S; KONUMA, M; SAROTT, FA; al., et
- Titel:
- NC-SI AND A-SI - KINETICS AND MECHANISM OF THE DEPOSITION AND THE CONTROL OF THE MATERIAL PROPERTIES - A REVIEW OF RECENT RESULTS
- Zeitschriftentitel:
- HELVETICA PHYSICA ACTA
- Jahr:
- 1987
- Band / Volume:
- 60
- Heft / Issue:
- 2
- Seitenangaben Beitrag:
- 185-185
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