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Author(s):
KUNSTMANN, T; VEPREK, S; SCHMIDBAUR, H; al., et 
Title:
Chemical vapor deposition of 3C-SiC on Si(100) from methyltrichlorosilane and methyltribromosilane 
Journal title:
SILICON CARBIDE AND RELATED MATERIALS 1995 
Year:
1996 
Journal volume:
142 
Pages contribution:
213-216