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- Author(s):
- ENSSLEN, K; VEPREK, S
- Title:
- MECHANISTIC STUDY OF GLOW-DISCHARGES TYPICAL OF DEPOSITION OF UC AND A-SI
- Journal title:
- HELVETICA PHYSICA ACTA
- Year:
- 1984
- Journal volume:
- 57
- Journal issue:
- 6
- Pages contribution:
- 741-741
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