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Document type:
Zeitschriftenaufsatz 
Author(s):
Pedone, D.; Langecker, M.; Münzer, A.; Wei, R.; Nagel, R.; Rant, U. 
Title:
Fabrication and electrical characterization of a pore-cavity-pore device 
Abstract:
Part of Special issue on New developments in nanopore research—from fundamentals to applications We present a solid state nanopore device structure comprising two nanopores which are stacked above each other and connected via a pyramidal cavity of 10 fl volume. The process of fabrication of the pore–cavity–pore device (PCP) relies on the formation of one pore in a Si3N4 membrane by electron beam lithography, while the other pore is chemically etched into the Si carrier by a feedback c...    »
 
Journal title:
J. Phys.: Condens. Matter 22 454115 Special issue on New developments in nanopore research—from fundamentals to applications 
Year:
2010 
Year / month:
2010-11 
Quarter:
4. Quartal 
Month:
Nov 
Language:
en 
Publisher:
IOP Publishing