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- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Scarpa, G., et al.
- Title:
- Pattern generation by using mutlistep room-temperature nanoimprint lithographie
- Book / Congress title:
- IEEE Nano 2009, Session WE2_3: Terascale Nanoelectronics
- Congress (additional information):
- Genoa, Italy, July 26-3, 2009
- Year:
- 2009
- Quarter:
- 3. Quartal
- Year / month:
- 2009-07
- Month:
- Jul
- Language:
- en
- Format:
- Text
BibTeX