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Document type:
Konferenzbeitrag 
Author(s):
Hirth, F.; Dudeck, S.; Jakobi, M.; Gerhard, D.; Koch, A.W. 
Title:
Thin film interferometer using a light source with spectrally non-equidistantly distributed sampling points 
Book / Congress title:
Proceedings of the SPIE Europe Optical Metrology Conference 
Congress (additional information):
ICM-International Conference Centre Munich, 14.-18.06.2009, Munich, Germany 
Year:
2009 
Language:
en 
Format:
Text