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Document type:
Konferenzbeitrag 
Author(s):
Giacomozzi, F.; Calaza, C.; Colpo, S.; Mulloni, V.; Collini, A.; Margesin, B.; Farinelli, P.; Casini, F.; Marcelli, R.; Mannocchi, G.; Vietzorreck, L. 
Title:
Technological and design improvements for RF Mems shunt switches 
Book / Congress title:
International Semiconductor Conference CAS 2007 
Year:
2007 
Pages:
163--266 
Language:
de 
Format:
Text