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Document type:
Zeitschriftenaufsatz 
Author(s):
Roth, S.; Ciemniak, C.; Coppi, C.; Feilitzsch, F.v.; Gütlein, A.; Isaila, C.; Lanfranchi, J.-C.; Pfister, S.; Potzel, W.; Westphal, W. 
Title:
Properties of Tungsten Thin Films Produced with the RF-Sputtering Technique 
Journal title:
Journal of Low Temperature Physics 
Year:
2008 
Journal volume:
151 
Journal issue:
1 -2 
Pages contribution:
216 -- 222 
Language:
en 
Format:
Text