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Document type:
Zeitschriftenaufsatz 
Author(s):
Bedyk, W. ; Niessner, M. ; Schrag, G. ; Wachutka, G. ; Margesin, B. ; Faes, A. 
Title:
Automated extraction of multi-energy domain reduced-order models demonstrated on capacitive MEMS microphones 
Journal title:
Sensors and Actuators A Physical 
Year:
2008 
Language:
de 
Format:
Text