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Document type:
Zeitschriftenaufsatz 
Author(s):
Böttcher, Artur; Schwaiger, Ruth; Pazdera, Tobias M; Exner, Daniela; Hauns, Jakob; Strelnikov, Dmitry; Lebedkin, Sergei; Gröger, Roland; Esch, Friedrich; Lechner, Barbara A J; Kappes, Manfred M 
Title:
Nanoscale patterning at the Si/SiO2/graphene interface by focused He+ beam 
Journal title:
Nanotechnology 
Year:
2020 
Journal volume:
31 
Journal issue:
50 
Pages contribution:
505302 
Fulltext / DOI:
Publisher:
IOP Publishing 
E-ISSN:
0957-44841361-6528 
Date of publication:
06.10.2020