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Document type:
Zeitschriftenaufsatz 
Author(s):
Schüttler, Markus; Meyer, Pascal; Schaff, Florian; Yaroshenko, Andre; Kunka, Danays; Besser, Heino; Pfeiffer, Franz; Mohr, Jürgen 
Title:
Height control for small periodic structures using x-ray radiography 
Journal title:
Measurement Science and Technology 
Year:
2016 
Journal volume:
27 
Pages contribution:
025015 
Publisher:
IOP Publishing 
E-ISSN:
0957-02331361-6501 
Date of publication:
11.01.2016