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Document type:
Konferenzbeitrag 
Author(s):
Nurmetov, U.; Fritz, T.; Müllner, E.; Dougherty, C.; Kreupl, F.; Brederlow, R. 
Title:
A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution 
Keywords:
CMOS integrated circuits; error compensation; sensors; stress measurement; N-Well-based primary elements; stress magnitude; CMOS temperature stabilized sensor; 2D CMOS stress sensor; 2D mechanical stress sensor; repeatable error compensation; pressure -100.0 MPa to 360.0 MPa; temperature 5.0 degC to 90.0 degC; Stress; Resistors; Temperature sensors; Temperature measurement; Robot sensing systems; Stress measurement 
Book / Congress title:
2019 Symposium on VLSI Circuits 
Year:
2019 
Month:
June 
Pages:
C64-C65