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- Dokumenttyp:
- Zeitschriftenaufsatz
- Autor(en):
- Burcea, Florin; Herrmann, Andreas; Li, Bing; Graeb, Helmut
- Titel:
- MEMS-IC Robustness Optimization Considering Electrical and Mechanical Design and Process Parameters
- Zeitschriftentitel:
- ACM Transactions on Design Automation of Electronic Systems
- Jahr:
- 2019
- Monat:
- June
- Volltext / DOI:
- doi:10.1145/3325068
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