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Document type:
Zeitschriftenaufsatz 
Author(s):
Burcea, Florin; Herrmann, Andreas; Li, Bing; Graeb, Helmut 
Title:
MEMS-IC Robustness Optimization Considering Electrical and Mechanical Design and Process Parameters 
Journal title:
ACM Transactions on Design Automation of Electronic Systems 
Year:
2019 
Month:
June