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Document type:
Konferenzbeitrag 
Author(s):
G. Bosetti, J. Manz, U. Krumbein and G. Schrag 
Title:
Full-System Simulation of Airborne Capacitive Mems Transducers Operating in the Audible and Ultrasonic Regime 
Book / Congress title:
20th International Conference on Solid-State Sensors, Actuators and Microsys-tems & Eurosensors XXXIII 
Date of congress:
23 -27.06 
Year:
2019