User: Guest  Login
Document type:
Konferenzbeitrag 
Author(s):
W. Ampunant, K. Ganzhorn, B. Laumer, G. Schrag 
Title:
Quantifying the mechanical reliability of MEMS using experimental and numerical methods 
Book / Congress title:
Mikrosystemtechnik Kongress 
Date of congress:
28- 30 Oktober 
Year:
2019