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Document type:
Zeitschriftenaufsatz 
Author(s):
Pöller, F.; Salazar Bloise, F.; Jakobi, M.; Wang, S.; Dong, J.; Koch, A.W. 
Title:
Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects 
Journal title:
Sensors 
Year:
2019 
Journal issue:
19 / 10 
Pages contribution:
1-12 
Reviewed:
ja 
Fulltext / DOI:
TUM Institution:
Lehrstuhl für Messsystem- und Sensortechnik