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Document type:
Zeitschriftenaufsatz 
Author(s):
Schüttler, M; Meyer, P; Schaff, F; Yaroshenko, A; Kunka, D; Besser, H; Pfeiffer, F; Mohr, J 
Title:
Height control for small periodic structures using x-ray radiography 
Journal title:
Measurement Science and Technology 
Year:
2016 
Journal volume:
27 
Journal issue:
Pages contribution:
025015 
Publisher:
IOP Publishing 
E-ISSN:
0957-02331361-6501 
Date of publication:
11.01.2016