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Document type:
Konferenzbeitrag 
Author(s):
Burcea, Florin; Herrmann, Andreas; Li, Bing; Graeb, Helmut 
Title:
MEMS-IC Optimization Considering Design Parameters and Manufacturing Variation from both Mechanical and Electrical Side 
Book / Congress title:
IEEE International Conference on Electronics, Circuits, and Systems (ICECS) 
Year:
2018 
Month:
dec