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- Dokumenttyp:
- Konferenzbeitrag
- Autor(en):
- Burcea, Florin; Herrmann, Andreas; Li, Bing; Graeb, Helmut
- Titel:
- MEMS-IC Optimization Considering Design Parameters and Manufacturing Variation from both Mechanical and Electrical Side
- Kongress- / Buchtitel:
- IEEE International Conference on Electronics, Circuits, and Systems (ICECS)
- Jahr:
- 2018
- Monat:
- dec
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