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Author(s):
Iivonen, Tomi; Hämäläinen, Jani; Marchand, Benoît; Mizohata, Kenichiro; Mattinen, Miika; Popov, Georgi; Kim, Jiyeon; Fischer, Roland A.; Leskelä, Markku 
Title:
Low-temperature atomic layer deposition of copper(II) oxide thin films 
Journal title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 
Year:
2016 
Journal volume:
34 
Journal issue:
Pages contribution:
01A109 
Fulltext / DOI:
Publisher:
American Vacuum Society 
E-ISSN:
0734-21011520-8559 
Date of publication:
01.01.2016