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Document type:
Konferenzbeitrag 
Author(s):
Kinghorst, Jakob; Geramifard, Omid; Luo, Ming; Chan, Hian-Leng; Yong, Khoo; Folmer, Jens; Vogel-Heuser, Birgit 
Title:
Hidden Markov Model-Based Predictive Maintenance in Semiconductor Manufacturing: A Genetic Algorithm Approach 
Abstract:
The accuracy of data-mining based predictive maintenance often relies on extensive process and machine knowledge to enable appropriate feature selection and data preprocessing. Measurement data obtained may be asynchronous and result in inaccurate features, affecting the accuracy of maintenance prediction. To overcome this drawback, this paper introduces an approach to automatically select a feature subset through a genetic algorithm. The full feature set is created based on different sliding wi...    »
 
Book / Congress title:
13th Conference on Automation Science and Engineering (CASE 2017) 
Year:
2017 
Covered by:
Scopus; Web of Science 
Reviewed:
ja