Iivonen, Tomi;Hämäläinen, Jani;Marchand, Benoît;Mizohata, Kenichiro;Mattinen, Miika;Popov, Georgi;Kim, Jiyeon;Fischer, Roland A.;Leskelä, Markku
Low-temperature atomic layer deposition of copper(II) oxide thin films
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
2016
34
1
01A109