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Author(s):
Hommel, S.; Killat, N.; Altes, A.; Schweinboeck, T.; Schmitt-Landsiedel, D.; Silvestri, M.; Haeberlen, O. 
Title:
{S}canning {M}icrowave {M}icroscopy for {E}lectronic {D}evice {A}nalysis on {N}anometre {S}cale 
Journal title:
Microelectronics Reliability 
Year:
2016 
Journal volume:
64 
Month:
sep