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Document type:
Patent 
Patent number:
US 9034689 B2 
Inventor:
Sekar; Deepak C. (San Jose, CA), Kreupl; Franz (Mountain View, CA), Rabkin; Peter (Cupertino, CA), Fu; Chu-Chen (San Ramon, CA) 
Assignee:
Sekar; Deepak C. (San Jose, CA), Kreupl; Franz (Mountain View, CA), Rabkin; Peter (Cupertino, CA), Fu; Chu-Chen (San Ramon, CA) 
Title:
Non-volatile storage with metal oxide switching element and methods for fabricating the same 
Abstract:
Non-volatile storage elements having a reversible resistivity-switching element and techniques for fabricating the same are disclosed herein. The reversible resistivity-switching element may be formed by depositing an oxygen diffusion resistant material (e.g., heavily doped Si, W, WN) over the top electrode. A trap passivation material (e.g., fluorine, nitrogen, hydrogen, deuterium) may be incorporated into one or more of the bottom electrode, a metal oxide region, or the top electrode of the re...    »
 
Publication date patent:
19.05.2015 
Year:
2015 
Language:
en 
Covered by:
Scopus 
TUM Institution:
Hybride Elektronische Systeme 
Format:
Text