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Autor(en):
DiNardo, Sergio; Farinelli, Paola; Giacomozzi, Flavio; Mannocchi, Giovanni; Marcelli, Romolo; Margesin, Benno; Mezzanotte, Paolo; Mulloni, Viviana; Russer, Peter; Sorrentino, Roberto; Vitulli, Francesco; Vietzorreck, Larissa 
Titel:
Broadband RF-MEMS Based SPDT 
Abstract:
A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage aroun...    »
 
Stichworte:
0 to 30 GHz, broadband RF-MEMS, broadband single pole double throw switch, capacitive shunt switch, coplanar waveguides, fabrication process, failure analysis, floating electrode, micro-electromechanical devices, micromachining, microswitches, microwave switches, ohmic series, passive circuits, RF performances, SPDT, surface micromachining, switches, UHF devices 
Kongress- / Buchtitel:
36th European Microwave Conference (EuMC) 
Verlagsort:
Manchester, UK 
Jahr:
2006 
Monat:
sep 
Seiten:
1727--1730