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Author(s):
Farinelli, Paola; Giacomozzi, Flavio; Mannocchi, Giovanni; Marcelli, Romolo; Margesin, Benno; Mezzanotte, Paolo; Di Nardo, Sergio; Russer, Peter; Sorrentino, Roberto; Vitulli, Francesco; Vietzorreck, Larissa 
Title:
RF-MEMS SPDT Switch on Silicon Substrate for Space Applications 
Abstract:
The paper illustrates the activity carried out under an ESA contract for the development of a miniaturized RF-MEMS SPDT switch and switch matrix using micromachining technology on a silicon substrate for power applications. A manufacturing procedure, based on an eight masks process, has been set up. At present, a broadband single-pole-double-throw (SPDT) switch operating in the 0-30 GHz frequency range has been fabricated and measured. Isolation of about -40 dB and insertion loss better than -0....    »
 
Keywords:
0 to 30 GHz, broadband single-pole-double-throw switch, design process, fabrication process, micromachining, micromachining technology, microswitches, microwave switches, miniaturized switch, RF-MEMS SPDT switch, Si, silicon, silicon substrate, space applications, substrates, switch matrix 
Book / Congress title:
Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems 
Publisher address:
Atlanta, GA, USA 
Year:
2004 
Month:
sep 
Pages:
151--154