User: Guest  Login
Author(s):
Vietzorreck, Larissa; Russer, Peter 
Title:
Numerical Investigation of Micromachined Structures with Thin Layers 
Abstract:
In the present paper we analyze numerically the high-frequency behavior of different micromachined structures including MEMS. One special feature of micromachined structures is the presence of very thin layers - compared to other geometrical dimensions, resulting from the technological process. With usual numerical methods, where the entire domain is discretized, those thin layers are difficult to consider. The alternatives are a very small mesh size with the resulting extreme long calculation t...    »
 
Book / Congress title:
30th European Microwave Conference (EUMA) 
Publisher address:
Paris, France 
Year:
2000 
Month:
oct 
Pages:
154--157