Benutzer: Gast  Login
Autor(en):
Vietzorreck, Larissa; Russer, Peter 
Titel:
Numerical Investigation of Micromachined Structures with Thin Layers 
Abstract:
In the present paper we analyze numerically the high-frequency behavior of different micromachined structures including MEMS. One special feature of micromachined structures is the presence of very thin layers - compared to other geometrical dimensions, resulting from the technological process. With usual numerical methods, where the entire domain is discretized, those thin layers are difficult to consider. The alternatives are a very small mesh size with the resulting extreme long calculation t...    »
 
Kongress- / Buchtitel:
30th European Microwave Conference (EUMA) 
Verlagsort:
Paris, France 
Jahr:
2000 
Monat:
oct 
Seiten:
154--157