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Author(s):
Vietzorreck, Larissa; Coccetti, Fabio; Chtchekatourov, Vitali; Russer, Peter 
Title:
Numerical Methods for the High-Frequency Analysis of MEMS Capacitive Switches 
Abstract:
In the present paper we analyze the high-frequency behaviour of a microelectromechanical capacitive switch by the transmission line matrix method (TLM) and by the method of lines (MoL). The numerical methods will be presented, especially the means which are necessary to avoid long calculation times and make the methods useful for an efficient design of the proposed structures. The obtained numerical results for the scattering parameters are compared with measurements in order to judge their accu...    »
 
Keywords:
calculation times, high-frequency analysis, MEMS capacitive switches, method of lines, micromechanical devices, Scattering parameters, semiconductor device models, semiconductor switches, S-parameters, transmission line matrix method, transmission line matrix methods 
Book / Congress title:
2nd Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems 
Publisher address:
Garmisch-Partenkirchen, Germany 
Year:
2000 
Month:
apr 
Pages:
123--124