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- Author(s):
- Vietzorreck, Larissa; Coccetti, Fabio; Chtchekatourov, Vitali; Russer, Peter
- Title:
- Modeling of MEMS Capacitive Switches by TLM
- Abstract:
- The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements
- Keywords:
- calculation times, high-frequency behaviour, MEMS capacitive switches, metal membrane switch, micromechanical devices, semiconductor device models, semiconductor switches, time-domain signal, TLM, transmission line matrix methods
- Book / Congress title:
- IEEE MTT-S International Microwave Symposium
- Volume:
- 2
- Publisher address:
- Boston, MA, USA
- Year:
- 2000
- Month:
- jun
- Pages:
- 1221--1224
- Fulltext / DOI:
- doi:10.1109/MWSYM.2000.863579
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