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Author(s):
Vietzorreck, Larissa; Coccetti, Fabio; Chtchekatourov, Vitali; Russer, Peter 
Title:
Modeling of MEMS Capacitive Switches by TLM 
Abstract:
The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements 
Keywords:
calculation times, high-frequency behaviour, MEMS capacitive switches, metal membrane switch, micromechanical devices, semiconductor device models, semiconductor switches, time-domain signal, TLM, transmission line matrix methods 
Book / Congress title:
IEEE MTT-S International Microwave Symposium 
Volume:
Publisher address:
Boston, MA, USA 
Year:
2000 
Month:
jun 
Pages:
1221--1224