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Autor(en):
Vietzorreck, Larissa; Coccetti, Fabio; Chtchekatourov, Vitali; Russer, Peter 
Titel:
Modeling of MEMS Capacitive Switches by TLM 
Abstract:
The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements 
Stichworte:
calculation times, high-frequency behaviour, MEMS capacitive switches, metal membrane switch, micromechanical devices, semiconductor device models, semiconductor switches, time-domain signal, TLM, transmission line matrix methods 
Kongress- / Buchtitel:
IEEE MTT-S International Microwave Symposium 
Band / Teilband / Volume:
Verlagsort:
Boston, MA, USA 
Jahr:
2000 
Monat:
jun 
Seiten:
1221--1224