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- Autor(en):
- Vietzorreck, Larissa; Coccetti, Fabio; Chtchekatourov, Vitali; Russer, Peter
- Titel:
- Modeling of MEMS Capacitive Switches by TLM
- Abstract:
- The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements
- Stichworte:
- calculation times, high-frequency behaviour, MEMS capacitive switches, metal membrane switch, micromechanical devices, semiconductor device models, semiconductor switches, time-domain signal, TLM, transmission line matrix methods
- Kongress- / Buchtitel:
- IEEE MTT-S International Microwave Symposium
- Band / Teilband / Volume:
- 2
- Verlagsort:
- Boston, MA, USA
- Jahr:
- 2000
- Monat:
- jun
- Seiten:
- 1221--1224
- Volltext / DOI:
- doi:10.1109/MWSYM.2000.863579
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