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Author(s):
Mangold, Tobias; Gulde, P.; Neumann, G.; Russer, Peter 
Title:
A Multichip Module Integration Technology on Silicon Substrate for High Frequency Applications 
Abstract:
We present a planar low-cost multichip module integration technology on a silicon substrate. It is designed for high frequency applications where bare dice are placed in substrate openings and connected through a thin film multilayer realized in a planar fashion on top of the embedded system. We discuss the technological realization and resulting properties of the suggested MCM concept. The paper also addresses high frequency performance of the described interconnecting technology pointing out t...    »
 
Keywords:
3D full-wave modeling, bare dice placement, embedded system, HF performance, high frequency applications, integrated circuit interconnections, MCM integration technology, MCM-D technology, microstrip circuits, microstrip transmission-line crossing, multichip module integration, multichip modules, planar low-cost integration technology, RF circuit design, Si, Si substrate, silicon, substrate openings, substrates, thin film multilayer, thin film wiring system, time-domain TLM method, transmission...    »
 
Book / Congress title:
Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems 
Publisher address:
Ann Arbor, MI, USA 
Year:
1998 
Month:
sep 
Pages:
181--184 
Fulltext / DOI: