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Author(s):
VEPREK, S.; Veprek-Heijman, M. G. J. 
Title:
Limits to the preparation of superhard nanocomposites: Impurities, deposition and annealing temperature 
Abstract:
Impurities, in particularly oxygen, degrade the mechanical properties of superhard nc-TiN/a-Si3N4 nanocomposites. In the present paper we show that relatively small oxygen impurities also hinder the diffusion and already at a level of about >= 0.8 at. 
Journal title:
THIN SOLID FILMS 
Year:
2012 
Journal volume:
522 
Pages contribution:
274--282