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Author(s):
Zähringer, S.; Purr, J.; Schwesinger, N. 
Title:
Manipulation of IDT-actuated piezoelectric membrane Actuators by Silicon Clamping 
Journal title:
Applied Mechanics and Materials 
Year:
2014 
Journal volume:
518 
Pages contribution:
215-219 
Reviewed:
ja 
Language:
en 
Publisher:
Trans Tech Publications 
Publisher address:
Switzerland