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Document type:
Zeitschriftenaufsatz
Author(s):
Koerdel, M.; Alatas, F.; Schick, A.; Jongman, J.; Sekhar, C.; Rupitsch, S.J.; Lerch, R.
Title:
Contactless Functionality Inspection of Flat-Panel Display Pixels and Thin-Film Transistors by Capacitive Coupling
Journal title:
IEEE Transactions on Electron Devices
Year:
2012
Journal issue:
Nov./Dez. 2012
Reviewed:
ja
Language:
en
Status:
Verlagsversion / published
Semester:
WS 12-13
Format:
Text
 BibTeX