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Autor(en):
Meier, H.; Russer, Peter 
Titel:
Analysis of Leaky Surface Acoustic Wave Reflections 
Abstract:
An accurate understanding of the reflection behavior of leaky surface acoustic waves (LSAW) is of particular interest in order to develop sophisticated computer aided design (CAD) tools. Thus, we have analyzed the propagation and reflection characteristic of LSAW under periodic metal grating structures. The electrically and mechanically induced reflections, as well as the anisotropy of the substrate material, are rigorously taken into account. Consequently, the second order effects associated wi...    »
 
Stichworte:
Al, Al electrodes, CAD, CAD tools, computer aided design tools, evanescent bulk modes, leaky surface acoustic wave reflections, LiTaOtextlesssubtextgreater3textless/subtextgreater, LiTaOtextlesssubtextgreater3textless/subtextgreater substrate, metallization ratios, periodic metal grating structures, phase velocity shift, propagating bulk modes, propagation characteristic, reflection characteristic, surface acoustic wave devices, surface acoustic wave filters, ultrasonic devices, ultrasonic propa...    »
 
Kongress- / Buchtitel:
IEEE Ultrasonics Symposium 
Band / Teilband / Volume:
Verlagsort:
Baltimore, MD, USA 
Jahr:
1993 
Monat:
oct 
Seiten:
201--204