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Document type:
Zeitschriftenaufsatz
Author(s):
Bareiß, M.; Imtaar, M. A.; Fabel, B.; Scarpa, G.; Lugli, P.
Title:
Temperature enhanced large area nano transfer printing on Si/SIO2 substrates using Si wafer stamps
Abstract:
Metal nano structures on various substrates such as Si wafers, SiO2 surfaces, or glass are of great importance on a variety of devices.The state of the art fabrication methods like optical and electron beam lithography are wet, complex, and costly processes. Nano transfer printing (nTP) canprovide a simple, fast, and low cost alternative. In the nano transfer process, thin metal layers are deposited on a stamp and transferred by pressing the stamp on the substrate. In this study, we focus on the...     »
Journal title:
Journal of Adhesion (Vol. 87 / Issue 9, 2011), 2011, 893-901
Year:
2011
Year / month:
2011-09
Quarter:
3. Quartal
Month:
Sep
Pages contribution:
893-901
Language:
en
Fulltext / DOI:
doi:10.1080/00218464.2011.600670
WWW:
http://www.tandfonline.com/doi/abs/10.1080/00218464.2011.600670
Publisher:
Taylor & Francis Online
Format:
Text
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