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Dokumenttyp:
Zeitschriftenaufsatz 
Autor(en):
Bareiß, M.; Imtaar, M. A.; Fabel, B.; Scarpa, G.; Lugli, P. 
Titel:
Temperature enhanced large area nano transfer printing on Si/SIO2 substrates using Si wafer stamps 
Abstract:
Metal nano structures on various substrates such as Si wafers, SiO2 surfaces, or glass are of great importance on a variety of devices.The state of the art fabrication methods like optical and electron beam lithography are wet, complex, and costly processes. Nano transfer printing (nTP) canprovide a simple, fast, and low cost alternative. In the nano transfer process, thin metal layers are deposited on a stamp and transferred by pressing the stamp on the substrate. In this study, we focus on the...    »
 
Zeitschriftentitel:
Journal of Adhesion (Vol. 87 / Issue 9, 2011), 2011, 893-901 
Jahr:
2011 
Jahr / Monat:
2011-09 
Quartal:
3. Quartal 
Monat:
Sep 
Seitenangaben Beitrag:
893-901 
Sprache:
en 
Verlag / Institution:
Taylor & Francis Online 
Format:
Text