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Document type:
Zeitschriftenaufsatz 
Author(s):
Niessner, M. ; Schrag, G.; Iannacci, J.; Wachutka, G. 
Title:
"Macromodel-based simulation and measurement of thed ynamic pull-in of vicously damped RF-MEMS switches" 
Journal title:
Sensors and Actuators A 
Year:
2011 
Journal issue:
A 172 
Pages contribution:
269-279 
Language:
en 
Format:
Text