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Document type:
Zeitschriftenaufsatz 
Author(s):
Koop, H., Schnurbusch, D., Müller, M., Gründl, T., Zech, M., Amann, M. C., Karrai, K., Holleitner, A. 
Title:
In situ direct visualization of irradiated electron-beam patterns on unprocessed resists using atomic force microscopy 
Journal title:
Journal of Vacuum Science and Technology 
Year:
2010 
Year / month:
2010-07 
Quarter:
3. Quartal 
Month:
Jul 
Journal issue:
28/4 
Reviewed:
ja 
Language:
en 
Print-ISSN:
1071-1023 
Status:
published (reviewed) 
Semester:
SS 02 
TUM Institution:
Lehrstuhl für Halbleitertechnologie (E26) 
Format:
Text