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Dokumenttyp:
Zeitschriftenaufsatz 
Autor(en):
Jegert, G.; Kersch, A.; Weinreich, W.; Lugli, P. 
Titel:
Ultimate scaling of TiN/ZrO 2 /TiN capacitors: Leakage currents and limitations due to electrode roughness 
Abstract:
n this paper, we investigate the influence of electrode roughness on the leakage current in TiN/high-κ ZrO 2 /TiN (TZT) thin-filmcapacitors which are used in dynamic random access memory cells. Based on a microscopic transport model, which is expanded to incorporate electrode roughness, we assess the ultimate scaling potential of TZT capacitors in terms of equivalent oxide thickness, film smoothness, thickness fluctuations, defect density and distribution, and conduction band offset (CBO). The...    »
 
Stichworte:
Leakage currents Electrodes Capacitors Dielectric thin films Dielectrics 
Zeitschriftentitel:
J. Appl. Phys. 109, 014504 (2011) 
Jahr:
2011 
Jahr / Monat:
2011-01 
Quartal:
1. Quartal 
Monat:
Jan 
Seitenangaben Beitrag:
14504 
Reviewed:
ja 
Sprache:
en 
Verlag / Institution:
AIP Publishing LLC. 
Semester:
WS 10-11 
Format:
Text